Influence of Post-deposition Heating Time and the Presence of Water Vapor on Sputter-coated Calcium Phosphate Crystallinity
Y. Yang1,
K.-H. Kim1,2,
C.M. Agrawal3,4, and
J.L. Ong1,4,*
1 The University of Texas Health Science Center at San Antonio, Department of Restorative Dentistry, Division of Biomaterials, MSC 7890, 7703 Floyd Curl Drive, San Antonio, TX 78229-3900;
2 Kyungpook National University, College of Dentistry and Institute of Biomaterials Research and Development, Department of Dental Biomaterials, 2-101 Dongin Dong, Jung-Gu, Daegu 700-422, Korea;
3 The University of Texas at San Antonio, College of Engineering, 6900 N. Loop 1604, San Antonio, TX 78249-0619; and
4 The University of Texas Health Science Center at San Antonio, Center for Clinical Bioengineering, Department of Restorative Dentistry, Division of Biomaterials, MSC 7890, 7703 Floyd Curl Drive, San Antonio, TX 78229-3900;

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Figure 1. Representative scanning electron micrograph of a continuous and dense as-sputtered calcium phosphate (CaP) coating on glass substrate. The as-sputtered CaP coating was observed to consist of nano-particles approximately 5 nm in diameter and in the range of 50 to 100 nm in diameter in the subsurface and surface, respectively.
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Figure 2. Representative x-ray diffraction patterns of as-sputtered calcium phosphate (CaP) coatings, hydroxyapatite (HA) target, and sputtered CaP coatings after a 400°C heat treatment at different heating times in (A) the absence of water vapor and (B) the presence of water vapor. The different surfaces on both (A) and (B) were (1) no heat treatment (as-sputtered), (2) heat treatment for 1 hr, (3) heat treatment for 2 hrs, (4) heat treatment for 4 hrs, and (5) HA target.
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Figure 3. Representative Fourier transform infrared spectrum of as-sputtered calcium phosphate (CaP) coatings, hydroxyapatite (HA) target, and sputtered CaP coatings after a 400°C heat treatment at different heating times. The different surfaces were (1) no heat treatment (as-sputtered), (2) heat treatment for 1 hr in the absence of water vapor, (3) heat treatment for 2 hrs in the absence of water vapor, (4) heat treatment for 4 hrs in the absence of water vapor, (5) heat treatment for 1 hr in the presence of water vapor, (6) heat treatment for 2 hrs in the presence of water vapor, (7) heat treatment for 4 hrs in the presence of water vapor, and (8) HA target. The arrow indicates the OH peak at 3572 cm-1, and the asterisk indicates the PO4 peaks at 1084 cm-1, 964 cm-1, 617 cm-1, 585 cm-1, and 458 cm-1.
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